The ultra fine dynamics of MEMS as revealed by the Poly tee micro system analyzer [6111-25]
- 著者名:
- Lawrence, E. M. ( Polytec, Inc, (USA) )
- Rembe C ( Polytec GMBH (Germany) )
- Boedecker S ( Polytec GMBH (Germany) )
- Zhang H ( Xcom Wireless, Inc. (USA) )
- 掲載資料名:
- Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6111
- 発行年:
- 2006
- 開始ページ:
- 61110L
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461537 [0819461539]
- 言語:
- 英語
- 請求記号:
- P63600/6111
- 資料種別:
- 国際会議録
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