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The ultra fine dynamics of MEMS as revealed by the Poly tee micro system analyzer [6111-25]

著者名:
掲載資料名:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6111
発行年:
2006
開始ページ:
61110L
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461537 [0819461539]
言語:
英語
請求記号:
P63600/6111
資料種別:
国際会議録

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