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Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices [6110-25]

著者名:
Swaminathan, K. ( Univ. of Delaware (USA) )
Murakowski, J. ( Univ. of Delaware (USA) )
Schuetz, C. ( Univ. of Delaware (USA) )
Schneider, G. J. ( Univ. of Delaware (USA) )
Citla, B. S. ( Univ. of Delaware (USA) )
Prather, D. W. ( Univ. of Delaware (USA) )
さらに 1 件
掲載資料名:
Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6110
発行年:
2006
開始ページ:
61100P
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461520 [0819461520]
言語:
英語
請求記号:
P63600/6110
資料種別:
国際会議録

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