Low-loss SPDT metal-to-metal contacts RF MEMS switch operted by electrostatic actuation [6035-06]
- 著者名:
Seki T. ( Ritsumeikan Univ. (Japan), OMRON Corp. (Japan) ) Uno Y. Narise K. Masuda T. Inoue K. Sato K. Jojima M. Sato F. ( OMRON Corp. (Japan) ) Imanaka K. ( Ritsumeikan Univ. (Japan), OMRON Corp. (Japan) ) Sugiyama S. ( Ritsumeikan Univ. (Japan) ) - 掲載資料名:
- Microelectronics: Design, Technology, and Packaging II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6035
- 発行年:
- 2006
- 開始ページ:
- 603506
- 終了ページ:
- 603506
- 総ページ数:
- 1
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460660 [0819460664]
- 言語:
- 英語
- 請求記号:
- P63600/6035
- 資料種別:
- 国際会議録
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