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System-level modeling of segmented deformable micromirror using multi-port-element network method [6032-18]

著者名:
  • He, Y.
  • Jiang, C.
  • Yuan, W. ( Northwestern Polytechnical Univ. (China) )
  • Huo, P. ( Northwestern Polytechnical Univ. (China) and Xi’an Institute of Electromechanical Information Technology (China) )
  • Ma, B. ( Northwestern Polytechnical Univ. (China) )
掲載資料名:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6032
発行年:
2006
開始ページ:
60320I
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
言語:
英語
請求記号:
P63600/6032
資料種別:
国際会議録

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