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Novel temperature sensor based on fabry-perot cavity srtucture and micro-mechanical bi-layered membranes [6032-10]

著者名:
  • Liu, Y. ( Xi’an Univ. of Technology (China) )
  • Zhao, H. ( Xi’an Univ. of Technology (China) and Xi,an Institute of Posts and Telecommunications (China) )
  • Zhang, S. ( Xi’an Univ. of Technology (China) )
掲載資料名:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6032
発行年:
2006
開始ページ:
60320A
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
言語:
英語
請求記号:
P63600/6032
資料種別:
国際会議録

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