Photoluminescene properties of hydrogenated amorphous silicon nitride thin films deposited by helicon wave plasma chemical vapor deposition [6020-123]
- 著者名:
Fu G. Yu W. Lu W. Zhu H. Zhang L. Ding W. ( Hebei Univ. (China) ) - 掲載資料名:
- Optoelectronic Materials and Devices for Optical Communications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6020
- 発行年:
- 2005
- 開始ページ:
- 60203E
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460516 [0819460516]
- 言語:
- 英語
- 請求記号:
- P63600/6020
- 資料種別:
- 国際会議録
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5
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Deposition of nanocrystalline SiC films using helicon wave plasma enhanced chemical vapor deposition
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