Design and fabrication of low-microwave loss coplannar waveguide and precise V groove on silicon substrate for optoelectronic packaging [6019-118]
- 著者名:
Yang H. Zhu H. Xie H. Zhao L. Zhou F. Wang W. ( Institute of Semiconductors (China) ) - 掲載資料名:
- Passive Components and Fiber-based Devices II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6019
- 発行年:
- 2005
- 開始ページ:
- 601938
- 終了ページ:
- 601938
- 総ページ数:
- 1
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460509 [0819460508]
- 言語:
- 英語
- 請求記号:
- P63600/6019
- 資料種別:
- 国際会議録
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