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Process control and material properties of thin electroless Co-based capping layers for copper interconnects (Invited Paper) [6002-25]

著者名:
Petrov N.
Valverde C.
Chen Q.
Xu C.
Paneccasio V.
Stritch D.
Witt C. ( Enthone Inc. (USA); )
Walker E.
Barnes J. ( ATMI (USA); )
Pavlov M.
Shalyt E. ( ECI Technology (USA); )
さらに 6 件
掲載資料名:
Nanofabrication: Technologies, Devices, and Applications II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6002
発行年:
2005
開始ページ:
60020O
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460264 [0819460265]
言語:
英語
請求記号:
P63600/6002
資料種別:
国際会議録

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