FPGA chip performance improvement with gate shrink through alternating PSM 9Onm process [5992-182]
- 著者名:
Yu, C. -C. Shieh, M. -F. Liu, E. Lin, B. ( UMC (Taiwan) ) Ho, J. Wu, X. ( Xilinx Inc. (USA) ) Panaite, P. Chacko, M. Zhang, Y. Lei, W. ( Synopsys Inc. (USA) ) - 掲載資料名:
- 25th Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5992
- 発行年:
- 2005
- パート:
- 2
- 開始ページ:
- 59925A
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- 言語:
- 英語
- 請求記号:
- P63600/5992
- 資料種別:
- 国際会議録
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9
国際会議録
Optimization of alternating PSM mask process for 65-nm poly-gate patterning using 193-nm lithography
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4
国際会議録
Reducing alternating phase shift mask (Alt-PSM) write-time through mask data optimization [5853-40]
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SPIE - The International Society of Optical Engineering |
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