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A study of Cr to Mosi in situ dry etching process to reduce plasma induced defect [5992-25]

著者名:
Jang, I. -Y.
Park, Y. -J.
Kwon, H. -J.
Moon, S. -Y.
Choi, S. -W.
Han, W. S. ( Samsung Electronics Co., Ltd (South Korea) )
さらに 1 件
掲載資料名:
25th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5992
発行年:
2005
パート:
1
開始ページ:
59920O
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
言語:
英語
請求記号:
P63600/5992
資料種別:
国際会議録

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