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Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions [5992-20]

著者名:
Poon, D. K.
Chapman, G. H.
Choo, C.
Wang, J.
Tu, Y.
La haye, M. L. ( Simon Fraser Univ. (Canada) )
さらに 1 件
掲載資料名:
25th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5992
発行年:
2005
パート:
1
開始ページ:
59920K
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
言語:
英語
請求記号:
P63600/5992
資料種別:
国際会議録

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