Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]
- 著者名:
Antos, R. ( Shizouka Univ. (Japan) ) Ohlidal, I. ( Masaryk Univ. (Czech Republic) ) Mistrik, J. Yamaguchi, T. ( Shizouka Univ. (Japan) ) Visnovsky, S. ( Charles Univ. (Czech Republic) ) Yamaguchi, S. Horie, M. ( Dainippon Screen Manufacturing Co., Ltd .(Japan) ) - 掲載資料名:
- Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5965
- 発行年:
- 2005
- 開始ページ:
- 59652B
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819459831 [0819459836]
- 言語:
- 英語
- 請求記号:
- P63600/5965
- 資料種別:
- 国際会議録
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