Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope [5879-37]

Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope [5879-37]

著者名:

Kim, J. -A.
Kim, J. W.
Park, C. -S.
Eom, T. B.
Kang, C. ( Korea Research Institute of Standards and Science (South Korea) )

掲載資料名:

Recent Developments in Traceable Dimensional Measurements III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5879

発行年:

2005

開始ページ:

58790Z

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458841 [0819458848]

言語:

英語

請求記号:

P63600/5879

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015918
シリーズID:	PA00000029
会議名:	Optics & Photonics : Recent Developments in Traceable Dimensional Measurements
回次:	2005 : 3rd
会議開催地:	San Diego, CA, USA
会議開催年:	2005.07.31-2005.08.01

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6 国際会議録 A novel Michelson interferometer combined with an autocollimator for the simultaneous measurement of linear and angular displacement [5879-39] Kim, J. W., Kim, J. -A, Kong, C. -S., Eom, T. B. SPIE - The International Society of Optical Engineering	12 国際会議録 Pitch calibration of one-dimensional grating standard by tapping mode nanometrological atomic force microscope Q. Huang, I. Misumi, S. Gonda, O. Sato, T. Kurosawa SPIE - The International Society of Optical Engineering

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