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Improvement in total measurement uncertainty for gate CD control [5878-24]

著者名:
Bunday, B. D. ( ISMI (USA); )
Sirjgabu, O.
Wen, Y.
Paranipe, A.
Terbeek, P. ( Therma-Wave, Inc. (USA) )
Allgair, J.
Peterson, A., ( ISMI (USA) )
さらに 2 件
掲載資料名:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5878
発行年:
2005
開始ページ:
58780M
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458834 [081945883X]
言語:
英語
請求記号:
P63600/5878
資料種別:
国際会議録

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