High-k Gate Stacks Electrical Characterization at the Nanoscale using Conductive-AFM
- 著者名:
- 掲載資料名:
- Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 220
- 発行年:
- 2006
- 開始ページ:
- 435
- 終了ページ:
- 447
- 総ページ数:
- 13
- 出版情報:
- Dordrecht: Springer
- ISBN:
- 9781402043659 [1402043651]
- 言語:
- 英語
- 請求記号:
- N17050/220
- 資料種別:
- 国際会議録
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10
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