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Growth of Diamond-Like Carbon Thin Film Using Microwave Chemical Vapor Deposition

著者名:
掲載資料名:
Functional materials and devices : papers presented at the International Conference on Functional Materials and Devices 2005 (ICFMD-2005), held in Kuala Lumpur, Malaysia, 6th-8th June 2005
シリーズ名:
Materials science forum
シリーズ巻号:
517
発行年:
2006
開始ページ:
57
終了ページ:
60
総ページ数:
4
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494040 [0878494049]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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