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Microstructure and Electrical Properties of RF Magnetron Sputtering Derived PZT Thin Films Deposited on Interlayer for Pyroelectric IR Sensor

著者名:
掲載資料名:
Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China
シリーズ名:
Materials science forum
シリーズ巻号:
510-511
発行年:
2006
開始ページ:
1042
終了ページ:
1045
総ページ数:
4
出版情報:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499953 [0878499954]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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