Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine

Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine

著者名:

掲載資料名:

Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China

シリーズ名:

Materials science forum

シリーズ巻号:

510-511

発行年:

2006

開始ページ:

734

終了ページ:

737

総ページ数:

4

出版情報:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499953 [0878499954]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015820
シリーズID:	PA00000012
会議名:	International Symposium on Eco-materials Processing & Design
回次:	7th
会議開催地:	Chengdu, China
会議開催年:	2006.01.08-2006.01.11

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