Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer
- 著者名:
- 掲載資料名:
- Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 505-507
- 発行年:
- 2006
- パート:
- 2
- 開始ページ:
- 1225
- 終了ページ:
- 1230
- 総ページ数:
- 6
- 出版情報:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499908 [0878499903]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
Trans Tech Publications |
Electrochemical Society |
Electrochemical Society |
6
国際会議録
Removal Rate, Uniformity and Defectivity Studies Of Chemical Mechanical Polishing of BPSG Films
Materials Research Society |
MRS - Materials Research Society |