Low-Temperature Preparation of Crystallized Zirconia Films by ECR Plasma MOCVD
- 著者名:
- 掲載資料名:
- Surface engineering for manufacturing applications : symposium held November 28-December 1, 2005, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 890
- 発行年:
- 2006
- 開始ページ:
- 183
- 終了ページ:
- 188
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998445 [1558998446]
- 言語:
- 英語
- 請求記号:
- M23500/890
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
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8
国際会議録
Preparation of Cu Films on Polymer Substrate by ECR-MOCVD Coupled with DC Bias at Room Temperature
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