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HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD

著者名:
Ahn, B.C.
Kim, J.H.
Kim, D.G.
Moon, B.Y.
Kim, K.N.
Lee, C.W.
Jang, J.
さらに 2 件
掲載資料名:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
297
発行年:
1993
開始ページ:
901
終了ページ:
906
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991934 [155899193X]
言語:
英語
請求記号:
M23500/297
資料種別:
国際会議録

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