STUDY ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF MICROCRYSTALLINE Si:H AND SiC:H FILMS

STUDY ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF MICROCRYSTALLINE Si:H AND SiC:H FILMS

著者名:

Demichelis, F.

掲載資料名:

Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

297

発行年:

1993

開始ページ:

515

終了ページ:

520

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991934 [155899193X]

言語:

英語

請求記号:

M23500/297

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015781
シリーズID:	PA00000011
会議名:	Symposium on amorphous silicon technology
回次:	1993
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.13-1993.04.16

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4 国際会議録 INFLUENCE OF CARBON ON STRUCTURAL, OPTICAL AND ELECTRICAL PROPERTIES OF MICROCRYSTALLINE SILICON CARBIDE Demichelis, F., Pirri, C.F., Tresso, E., DellaMea, G., Quaranta, A., Rigato, V., Ferraris, M., Rava, P. Materials Research Society	10 国際会議録 HYDROGEN DIFFUSION IN a-SiC:H Demichelis, F., Pirri, C. F., Tresso, E., Amato, G., Mea, Delta G Materials Research Society
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