GROWTH AND SURFACE MORPHOLOGY OF THIN SILICON FILMS USING AN ATOMIC FORCE MICROSCOPE

GROWTH AND SURFACE MORPHOLOGY OF THIN SILICON FILMS USING AN ATOMIC FORCE MICROSCOPE

著者名:

掲載資料名:

Atomic-scale imaging of surfaces and interfaces : symposium held November 30-December 2, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

295

発行年:

1993

開始ページ:

65

終了ページ:

70

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991903 [1558991905]

言語:

英語

請求記号:

M23500/295

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015779
シリーズID:	PA00000011
会議名:	Symposium on atomic-scale imaging of surfaces and interfaces
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.02

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