PARAMAGNETIC NITROGEN DEFECTS IN SILICON NITRIDE

PARAMAGNETIC NITROGEN DEFECTS IN SILICON NITRIDE

著者名:

掲載資料名:

Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

284

発行年:

1993

開始ページ:

101

終了ページ:

106

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991798 [1558991794]

言語:

英語

請求記号:

M23500/284

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015768
シリーズID:	PA00000011
会議名:	Symposium on amorphous insulating thin films
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.12.01-1992.12.04

類似資料:

1 国際会議録 Paramagnetic Point Defects in Amorphous Thin Films of 5i02 and Si3N4: An Update Poindexter, E.H., Warren, W.L. Electrochemical Society	7 国際会議録 RELATIONSHIP BETWEEN STRAINED SILICON-OXYGEN BONDS AND RADIATION INDUCED PARAMAGNETIC POINT DEFECTS IN SILICON DIOXIDE Warren, W. L., Lenahan, P. M., Brinker, C. J., Ashley, C. S. Materials Research Society
2 国際会議録 GaAs SURFACE STABILIZATION BY VACUUM ANNEAL WITH SiO Gerardi, G.J., Rong, F.C., Poindexter, E.H., Harmatz, M., Shen, H., Warren, W.L. Materials Research Society	8 国際会議録 Porous silicon electroluminescence mechanisms and defect analysis Harvey,J.F., Poindexter,E.H., Morton,D.C., Pong,F.C., Lux,R.A., Tsu,R. Kluwer Academic Publishers
3 国際会議録 OBSERVATION OF PARAMAGNETIC SILICON DANGLING ORBITALS IN LUMINESCENT POROUS SILICON Rong, F.C., Poindexter, E.H., Harvey, J.F., Morton, D.C., Lux, R.A., Gerardi, G.J. Materials Research Society	9 国際会議録 DEFECT STATES IN SILICON NITRIDE Robertson, J., Powell, M.J. Materials Research Society
4 国際会議録 PROCESS-INDUCED POINT DEFECTS IN OXIDEZ SILICON STRUCTURES Caplan, P.J., Poindexter, E.H., Vasudev, P.K., Henderson, R.C. Materials Research Society	10 国際会議録 ROLE OF HYDROGEN IN SILICON NITRIDE FILMS PREPARED BY VARIOUS DEPOSITION TECHNIQUES Kanicki, J. Materials Research Society
5 国際会議録 THE GENERATION AND BLEACHING OF POSITIVE CHARGE IN GATE-QUALITY NITROGEN-RICH AMORPHOUS SILICON NITRIDE BY SUB-BANDGAP ILLUMINATION Kanicki, J., Sankaran, M. Materials Research Society	11 国際会議録 INVESTIGATION OF THE SILICON NITRIDE ON HYDROGENATED AMORPHOUS SILICON INTERFACE Gelaltos, A. V, Kanicki, J. Materials Research Society
6 国際会議録 OPTICALLY INDUCED PARAMAGNETISM IN AMORPHOUS HYDROGENATED SILICON NITRIDE THIN FILMS Warren, W.L., Kanichi, J., Rong, F.C., Buchwald, W.R., Harmatz, M. Materials Research Society	12 国際会議録 *ELECTRONIC STRUCTURE OF DEFECTS IN AMORPHOUS SILICON NITRIDE Robertson, John Materials Research Society

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