SPECTROSCOPIC ELLIPSOMETRY AND INTERFERENCE REFLECTOMETRY MEASUREMENTS OF CVD SILICON GROWN ON OXIDIZED SILICON

SPECTROSCOPIC ELLIPSOMETRY AND INTERFERENCE REFLECTOMETRY MEASUREMENTS OF CVD SILICON GROWN ON OXIDIZED SILICON

著者名:

掲載資料名:

Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

283

発行年:

1993

開始ページ:

561

終了ページ:

566

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991781 [1558991786]

言語:

英語

請求記号:

M23500/283

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015767
シリーズID:	PA00000011
会議名:	Symposium on microcrystalline semiconductors
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

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