VISIBLE PHOTOLUMINESCENCE AND MICROSTRUCTURE OF ANNEALED AND CHEMICALLY ETCHED AMORPHOUS Si

VISIBLE PHOTOLUMINESCENCE AND MICROSTRUCTURE OF ANNEALED AND CHEMICALLY ETCHED AMORPHOUS Si

著者名:

掲載資料名:

Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

283

発行年:

1993

開始ページ:

33

終了ページ:

38

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991781 [1558991786]

言語:

英語

請求記号:

M23500/283

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015767
シリーズID:	PA00000011
会議名:	Symposium on microcrystalline semiconductors
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

類似資料:

1 国際会議録 PHOTOLUMINESCENCE AND STRUCTURE OF CHEMICALLY ETCHED Si Shih, S., Jung, K.H., Hsieh, T.Y., Sarathy, J., Tsai, C., Li, K.-H., Campbell, J.C., Kwong, D.L. Materials Research Society	7 国際会議録 THE ROLE OF SILICON MONOHYDRIDE AND DIHYDRIDE IN THE PHOTOLUMINESCENCE OF POROUS SILICON AND PHOTOLUMINESCENCE OF POROUS SILICON BURIED UNDERNEATH EPITAXIAL GaP Tsai, C., Li, K.-H., Sarathy, J., Jung, K., Shth, S., Hance, B.K., White, J.M., Kwong, D.-L., Sharps, P.R., Timmons, … Materials Research Society
2 国際会議録 STRUCTURAL INVESTIGATION OF PHOTOLUMINESCENT POROUS Si BY TRANSMISSION ELECTRON MICROSCOPY Shih, S., Jung, K.H., Kwong, D.L. Materials Research Society	8 国際会議録 BE-SOI WITH ETCH STOP LAYERS GROWN BY RTCVD D. Feijóo, M.L. Green, D. Brasen, H.S. Luftman, B.B. Weir, J. Blanco, T. Boone, L.C. Feldman Electrochemical Society
3 国際会議録 GexSi1-x WAVEGUIDES GROWN BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION Jung, K.H., Mayer, R.A., Hsieh, T.Y., Campbell, J.C., Kwong, D.L. Materials Research Society	9 国際会議録 REACTION KINETICS OF SPUTTER-DEPOSITED Ti ON Si02 SUBSTRATES DURING RAPID THERMAL ANNEALING Yun, E. J., Chun, H. G., Jung, K., Kwong, D. L., Lee, S. Materials Research Society
4 国際会議録 DOPANT ENHANCED LOW-TEMPERATURE EPITAXIAL GROWTH BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION Hsieh, T.Y., Jung, K.H., Kwong, D.L. Materials Research Society	10 国際会議録 PHOTOLUMINESCENCE OF CHEMICALLY ETCHED POLYCRYSTALLINE AND AMORPHOUS Si THIN FILMS Steckl, A.J., Xu, J., Mogul, H.C. Materials Research Society
5 国際会議録 STRUCTURE AND COMPOSITION OF LUMINESCENT LATERALLY ANODIZED POROUS Si Jung, K.H., Shih, S., Hsieh, T.Y., Campbell, J.C., Kwong, D.L., George, T., Lin, T.L., Liu, H.Y., Zavada, J., Novak, S. Materials Research Society	11 国際会議録 Impact of thin resist processes on post-etch LER Mahorowala, A.P., Goldfarb, D.L., Temple, K., Petrillo, K.E., Pfeiffer, D., Babich, K., Angelopoulos, M., Gallatin, … SPIE-The International Society for Optical Engineering
6 国際会議録 RTP-CVD OF Si MATERIALS AND DEVICES FOR ULSI APPLICATIONS Kwong, D.L., Hsieh, T.Y., Jung, K.H. Materials Research Society	12 国際会議録 Si AND GeSi1-x EPITAXIAL GROWTH ON SOI STRUCTURES BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION Hseih, T. Y., Jung, K. H., Kwong, D. L., Lin, S., Marcus, H. L. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12