CHEMICAL AND ELECTRICAL MECHANISMS IN TITANIUM, PLATINUM, AND HAFNIUM CONTACTS TO ALPHA (6H) SILICON CARBIDE

CHEMICAL AND ELECTRICAL MECHANISMS IN TITANIUM, PLATINUM, AND HAFNIUM CONTACTS TO ALPHA (6H) SILICON CARBIDE

著者名:

Porter, L.M.

掲載資料名:

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

282

発行年:

1993

開始ページ:

471

終了ページ:

480

総ページ数:

10

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991774 [1558991778]

言語:

英語

請求記号:

M23500/282

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015766
シリーズID:	PA00000011
会議名:	Symposium on chemical perspectives of microelectric materials
回次:	3rd
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.03

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2 国際会議録 HETEROEPITAXIAL GROWTH AND CHARACTERIZATION OF TITANIUM FILMS ON ALPHA (6H) SILICON CARBIDE Spellman, L. M., Glass, R. C., Davis, R. F., Humphreys, T. P., Jeon, Hyeongtag, Namanich, R. J., Chevacharoenkul, Sopa, … Materials Research Society	8 国際会議録 ELECTRICAL AND CHEMICAL CHARACTERIZATION OF CONTACTS TO SILICON CARBIDE Petit, Jeremy B., Zeller, Mary V. Materials Research Society
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