EFFECTS OF GAMMA-RAY IRRADIATION AND THERMAL ANNEALING ON CHARACTERISTICS OF 3C-SiC MOS STRUCTURE

EFFECTS OF GAMMA-RAY IRRADIATION AND THERMAL ANNEALING ON CHARACTERISTICS OF 3C-SiC MOS STRUCTURE

著者名:

Yoshikawa, M.

掲載資料名:

Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

281

発行年:

1993

開始ページ:

797

終了ページ:

802

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991767 [155899176X]

言語:

英語

請求記号:

M23500/281

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015765
シリーズID:	PA00000011
会議名:	Symposium on semiconductor heterostructures for photonic and electronic applications
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

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2 国際会議録 Characterization of Defects in As-Grown and Electron-Irradiated 3C-SiC Epilayers by Using Slow Positron Itoh,H., Yoshikawa,M., Nashiyama,I., Wei,L., Tanigawa,S., Misawa,S., Okumura,H., Yoshida,S. Trans Tech Publications	8 国際会議録 Influence of Post-Oxidation Annealing on Electrical Characteristics in 6H-SiC MOSFETs Ohshima, T., Yoshikawa, M., Itoh, H., Kojima, K., Okada, S., Nashiyama, I. Trans Tech Publications
3 国際会議録 POSITRON ANNIHILATION AND ELECTRON RESONANCE OF ELECTRON-IRRADIATED 3C-SiC Itoh, Hisayoshi, Yoshikawa, Masahito, Wei, Long, Tanigawa, Shoichiro, Nashiyama,. Isamu, Misawa, Shunji, Okumura, … Materials Research Society	9 国際会議録 Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures Yoshikawa, M., Kojima, K., Ohshima, T., Itoh, H., Okada, S., Ishida, Y. Trans Tech Publications
4 国際会議録 Study of Thermal Annealing of Vacancies in Ion Implanted 3C-SiC by Positron Annihilation Ohshima,T., Uedono,A., Itoh,H., Abe,K., Suzuki,R., Ohdaira,T., Aoki,Y., Yoshikawa,M., Mikado,T., Okumura,H., Yoshida,S., … Trans Tech Publications	10 国際会議録 Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions Ohshima, T., Uedono, A., Itoh, H., Yoshikawa, M., Kojima, K., Okada, S., Nashiyama, I., Abe, K., Tanigawa, S., Frank, … Trans Tech Publications
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6 国際会議録 Gamma-Ray Irradiation Effects on the Electrical Characteristics of 6H-SiC MOSFETs with Annealed Gate-Oxide Ohshima, T., Lee, K.K., Ohi, A., Yoshikawa, M., Itoh, H. Trans Tech Publications	12 国際会議録 X-Ray Photoelectron Spectroscopy Studies of Post-Oxidation Process Effects on Oxide/SiC Interfaces Hijikata, Y., Yaguchi, H., Yoshikawa, M., Yoshida, S. Trans Tech Publications

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