BORON DIFFUSION IN Si1-XGeX STRAINED LAYERS
- 著者名:
Moriya, N. King, C.A. Feldman,L.. Luftman, H.S. Green, M.L. Bevk, J. Weir, B.E. - 掲載資料名:
- Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 281
- 発行年:
- 1993
- 開始ページ:
- 427
- 終了ページ:
- 432
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991767 [155899176X]
- 言語:
- 英語
- 請求記号:
- M23500/281
- 資料種別:
- 国際会議録
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4
国際会議録
Selective and Non-Selective Rapid Thermal Epitaxy of Si/Si1-xGe, Heterojunction Bipolar Transistors
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