CHARACTERIZATION OF THE ZnSe/GaAs INTERFACE LAYER BY TEM AND SPECTROSCOPIC ELLIPSOMETRY
- 著者名:
Dahmani, R. Salamanca-Riba, L. Beesabathina, D.P. Nguyen, N.V. Chandler-Horowitz, D. Jonker, B.T. - 掲載資料名:
- Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 280
- 発行年:
- 1993
- 開始ページ:
- 271
- 終了ページ:
- 274
- 総ページ数:
- 4
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991750 [1558991751]
- 言語:
- 英語
- 請求記号:
- M23500/280
- 資料種別:
- 国際会議録
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11
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ANALYSIS FOR THE CHARACTERIZATION OF OXYGEN IMPLANTED SILICON (SIMOX) BY SPECTROSCOPIC ELLIPSOMETRY
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