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EPITAXIAL PHASE FORMATION OF FeSi2 IN AN Fe-IMPLANTED Si BY ION IRRADIATION AND RAPID THERMAL ANNEALING

著者名:
Lin, X.W.
Behar, M.
Desimoni, J.
Bernas, H.
Swider, W.
Liliental-Weber, Z.
Washburn, J.
さらに 2 件
掲載資料名:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
279
発行年:
1993
開始ページ:
535
終了ページ:
540
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
言語:
英語
請求記号:
M23500/279
資料種別:
国際会議録

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