Blank Cover Image

*PLASMA IMMERSION ION IMPLANTATION OF SEMICONDUCTORS

著者名:
掲載資料名:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
279
発行年:
1993
開始ページ:
297
終了ページ:
306
総ページ数:
10
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
言語:
英語
請求記号:
M23500/279
資料種別:
国際会議録

類似資料:

1 国際会議録 Plasma Immersion Ion Implatation: A Perspective

Yu C., Cheung W. N.

Kluwer Academic Publishers
7 国際会議録 IMPLANTATION INDUCED CHARGE TRAPPING AND INTERFACE STATES GENERATION IN Si-SiO2 SYSTEM

Wong, H., Cheung, N.W.

Materials Research Society
2 国際会議録 SHALLOW P+-N JUNCTION FABRICATION BY PLASMA IMMERSION ION IMPLANTATION

Pio, C. A., Qian, X. Y., Jones, E., Lieberman, M. A., Cheung, N. W.

Materials Research Society
8 国際会議録 THE EFFECTS OF PLASMA IMMERSION ION IMPLANTATION ON THERMAL HILLOCK FORMATION

Pico, Carey A., Tao, Jiang, Cheung, Nathan

Materials Research Society
3 国際会議録 PLASMA IMMERSION ION IMPLANTATION FOR IMPURITY GETTERING IN SILICON

Wong, H., Qian, X. Y., Cheung, N. W., Lieverman, M. A., Brown, I. G., Yu, K. M.

Materials Research Society
9 国際会議録 Ion-Cut Silicon Layer Transfer with Patterned Implantation of Hydrogen

Yun, C H, Wengrow, A B, Cheung, NW, Zheng, Y, Welty, R J, Guan, Z F, Smith, K V, Asbeck, PM, Yu, E T, Lau, S S

Electrochemical Society
4 国際会議録 ULTRA-SHALLOW P+/N JUNCTIONS FORMED BY SiF4 PREAMORPHIZATION AND BF3 IMPLANTATION USING PLASMA IMMERSION ION IMPLANTATION

Jones, Erin C., Im, Seongil, Cheung, Nathan W.

Materials Research Society
10 国際会議録 Plasma Immersion Ion Implantation for SOI Fabrication by the Genesis Process

Roth, I, Bryan, M, Liu, W, Qin, S, Chan, C

Electrochemical Society
5 国際会議録 Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation

Fan, Z., Chu, Paul K., Lu, X., Iyer, S. S. K., Cheung, N. W.

MRS - Materials Research Society
11 国際会議録 Surface modification by plasma immersion ion processing

Walter,K.C., Lee,D.H., He,X.M., Baker,N.P., Nastasi,M., Munson,C.P., Scarborough,W.K., Taszewski,M., Wood,B.P.

SPIE-The International Society for Optical Engineering
6 国際会議録 SELECTIVE COPPER PLATING IN SILICON DIOXIDE TRENCHES WITH METAL PLASMA IMMERSION ION IMPLANTATION

Kiang, Meng-Hsiung, Pico, Carey A., Lieberman, Michael A., Cheung, Nathan W., Qian, X. Y., Yu, K. M.

Materials Research Society
12 国際会議録 Composition And Structure Of SiCx:H Films Formed By Plasma Immersion Ion Implantation From A Methane Plasma

Ensinger, W., Klatt, C., Volz, K.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12