DETECTION OF TITANIUM SILICIDE FORMATION AND PHASE TRANSFORMATION BY PICOSECOND UNTRASONICS

DETECTION OF TITANIUM SILICIDE FORMATION AND PHASE TRANSFORMATION BY PICOSECOND UNTRASONICS

著者名:

Lin, H.-N,

掲載資料名:

Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

260

発行年:

1992

開始ページ:

221

終了ページ:

226

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991552 [1558991557]

言語:

英語

請求記号:

M23500/260

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015744
シリーズID:	PA00000011
会議名:	Symposium on advanced metallization and processing for semiconductor devices and circuits
回次:	2nd
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.27-1992.05.01

類似資料:

1 国際会議録 DETECTION OF THIN INTERFACIAL LAYERS BY PICOSECOND ULTRASONICS Tas, G., Stoner, R.J., Maris, H.J., Rubloff, G.W., Oehrlein, G.S., Halbout, J.M. Materials Research Society	7 国際会議録 Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide Lavoie, C., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Jordan-Sweet, J., Saenger, K. L., Doany, F. MRS - Materials Research Society
2 国際会議録 STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE Svilan, V., Harper, J. M. E., Cabral, C., Jr., Clevenger, L. A. MRS - Materials Research Society	8 国際会議録 In-situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si Ozcan, A.S., Ludwig K.F., Jr., Lavoie, C., Cabral, C., Jr., Harper, J.M.E. Materials Research Society
3 国際会議録 Microstructural Analysis Of Copper Interconnections Using Picosecond Ultrasonics Harper, J.M., Malhotra, S.G., Cabral, Jr., C., Lavoie, C., Hao, H., Homsi, W., Maris, H.J. Materials Research Society	9 国際会議録 Reduction of the C54-TiSi2 Phase Formation Temperature Using Metallic Impurities Mann, R. W., Clevenger, L. A., Miles, G. L., Harper, J. M. E., Cabral, C., Jr, d'Heurle, F. M., Knotts, T. A., Rakowski, … MRS - Materials Research Society
4 国際会議録 Surface Roughening During Titanium Silicide Formation: A Comparison Between Si(100) and Poly-Si Substrates Lavoie, C., Martel, R., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E. MRS - Materials Research Society	10 国際会議録 Phase Formation in Cu(Sn) Alloy Thin Films Clevenger, L. A., Arcot, B., Ziegler, W., Colgan, E. G., Hong, Q. Z., d'Heurle, F. M., Cabral, C., Jr., Gallo, T. A., … MRS - Materials Research Society
5 国際会議録 In Situ X-ray Diffraction Analysis of TiSi2 Phase Formation From a Titanium-Molybdenum Bilayer Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Roy, R. A., Saenger, K. L., Miles, G. L., Mann, R. W. MRS - Materials Research Society	11 国際会議録 Influence of Substrate Temperature During Sputter Deposition on the Subsequent Formation of Titanium Disilicide Ozcan, A.S., Ludwig Jr., K.F., Cabral Jr., C., Lavoie, C., Harper, J.M.E. Materials Research Society
6 国際会議録 SILICIDE FORMATION IN Ti-Si AND Co-Si REACTIONS Clevenger, L. A., Hong, Q. Z., Mann, R., Harper, J. M. E., Barmak, K., Cabral, C., Jr., Nobili, C., Ottaviani, G. MRS - Materials Research Society	12 国際会議録 In Situ Monitoring of Thin Film Reactions During Rapid Thermal Annealing: Nickel Silicide Formation Lavoje, C., Purtell, R., Cola, C., Detavernier, C., Desjardins, P., Jordan-Sweet, J., Cabral, C., Jr., d'Heurle, F.M., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12