CRYSTAL ORIGINATED SINGULARITIES ON SILICON WAFERS AFTER SCl CLEANING

CRYSTAL ORIGINATED SINGULARITIES ON SILICON WAFERS AFTER SCl CLEANING

著者名:

掲載資料名:

Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

259

発行年:

1992

開始ページ:

161

終了ページ:

166

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991545 [1558991549]

言語:

英語

請求記号:

M23500/259

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015743
シリーズID:	PA00000011
会議名:	Symposium on chemical surface preparation, passivation, and cleaning for semiconductor growth and processing
回次:	1992
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.27-1992.04.29

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5 国際会議録 Characterization of the direct Bonding of Silicon Wafers after Treatment in Dilute HF Solutions Okada, C., Kawai, Y., Morita, E., Saitou, Y. Electrochemical Society	11 国際会議録 Laser cleaning of silicon wafers: mechanisms and efficiencies Mosbacher,M., Bertsch,M., Munzer,H.-J., Dobler,V., Runge,B.-U., Bauerle,D., Boneberg,J., Leiderer,P. SPIE-The International Society for Optical Engineering
6 国際会議録 Development of a Modified Silicon Wafer Clean to Improve Lifetime Hackenberg, D.L., Butler, B.J., Cameron, R.C., Linn, J.H., Lobmeyer, R.N., McNamara, J.M., Pasqua, R.V., Rafie, S., … Electrochemical Society	12 国際会議録 Clean and Conductive Wafer Bonding for MEMS C. Yun, J. Martin, L. Chen, T.J. Frey Electrochemical Society

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