Blank Cover Image

CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION

著者名:
Sofield, C.J.
Murrell, M.P.
Sugden, S.
Heyns, M.
Verhaverbecke, S.
Welland, M.E.
Golan, B.
Barnes, J.
さらに 3 件
掲載資料名:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
259
発行年:
1992
開始ページ:
105
終了ページ:
112
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
言語:
英語
請求記号:
M23500/259
資料種別:
国際会議録

類似資料:

Verhaverbeke, S., Alay, J., Mertens, P., Meuris, M., Heyns, M., Vandervorst, W., Murrell, M., Sofield, C.

Materials Research Society

Depas, M., Heyns, M.M., Nigam, T., Kenis, K., Sprey, H., Wilhelm, R., Crossley, A., Sofield, C.J., Graef, D.

Electrochemical Society

Murrell, Martin P., O'Shea, Sean J., Barnes, Jack, Welland, Mark E., Sofield, Carl J.

MRS - Materials Research Society

Nigam, T., Depas, M., Heyns, M., Sofield, C. J., Mapeldoram, L.

MRS - Materials Research Society

Sugden, Stephen, Sofield, Carl J., Murrell, Martin P.

Materials Research Society

Verneire, B., Rotondaro, A.L.P., Mertens, P.W., Verhaverbeke, S., Heyns, M.M.

Electrochemical Society

Hucknall, P. K., Sugden, S., Sofield, C. J., Noakes, T. C. Q., McConville, C. F.

MRS - Materials Research Society

Muthuvel, M., Ward, L., Stickney, J.

Electrochemical Society

Vermeulen, W.J.C., Kwakman, L.F.Tz., Werkhoven, C.J., Granneman, E.H.A., Verhaverbeke, S., Heyns, M.

Electrochemical Society

Kriel,C.J., Heyns,P.S.

SPIE - The International Society for Optical Engineering

Onsia, B., Schellkes, E., Vos, R., De Gendt, S., Doll, O., Fester, A., Kolbesen, B., Hoffman, M., Hatcher, Z., Wolke, …

Electrochemical Society

Saifullah, M.S., Welland, M.E.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12