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*IN SITU LOW TEMPERATURE CLEANING AND PASSIVATION OF SILICON BY REMOTE HYDROGEN PLASMA FOR SILICON-BASED EPITAXY

著者名:
Banerjee, S.
Tasch, A.
Hsu, T.
Qian, R.
Kinosky, D.
Irby, J.
Mahajan, A.
Thomas, S.
さらに 3 件
掲載資料名:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
259
発行年:
1992
開始ページ:
43
終了ページ:
54
総ページ数:
12
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
言語:
英語
請求記号:
M23500/259
資料種別:
国際会議録

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