GROWTH OF Ge/Si AMORPHOUS SUPERLATTICES BY DUAL-TARGET DC MAGNETRON SPUTTERING
- 著者名:
Jarrendahl, K. Birch, J. Hultman, L. Wallenberg, L.R. Radnoczi, G. Arwin, H. Sundgren, J-E. - 掲載資料名:
- Amorphous silicon technology, 1992
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 258
- 発行年:
- 1992
- 開始ページ:
- 571
- 終了ページ:
- 576
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991538 [1558991530]
- 言語:
- 英語
- 請求記号:
- M23500/258
- 資料種別:
- 国際会議録
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