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STRUCTURAL CHARACTERIZATION OF POROUS SILICON FABRICATED BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF Si WAFERS

著者名:
Miyazaki, S.
Yasaka, T.
Okamoto, K.
Shiba, K.
Sakamoto, K.
Hirose, M.
さらに 1 件
掲載資料名:
Light emission from silicon : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
256
発行年:
1992
開始ページ:
185
終了ページ:
188
総ページ数:
4
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991507 [1558991506]
言語:
英語
請求記号:
M23500/256
資料種別:
国際会議録

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