CVD OF SILICON NITRIDE PLATE FROM HSiCI3-NH3-H2-MIXTURES
- 著者名:
- 掲載資料名:
- Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 250
- 発行年:
- 1992
- 開始ページ:
- 161
- 終了ページ:
- 166
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991446 [1558991441]
- 言語:
- 英語
- 請求記号:
- M23500/250
- 資料種別:
- 国際会議録
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5
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