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SOL GEL DERIVED ALUMINUM NITRIDE THIN FILMS VIA THE NITRIDATION OF ALUMINA

著者名:
掲載資料名:
Synthesis and processing of ceramics--scientific issues : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
249
発行年:
1992
開始ページ:
207
終了ページ:
212
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991439 [1558991433]
言語:
英語
請求記号:
M23500/249
資料種別:
国際会議録

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