ATOMIC LAYER EPITAXY IN A ROTATING DISK REACTOR
- 著者名:
- 掲載資料名:
- Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 240
- 発行年:
- 1992
- 開始ページ:
- 165
- 終了ページ:
- 170
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991347 [1558991344]
- 言語:
- 英語
- 請求記号:
- M23500/240
- 資料種別:
- 国際会議録
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Vertical high-speed rotating disk reactors for production scale MOVPE of compound semiconductors
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