MECHANICAL TESTING OF BONDED SILICON ON INSULATOR WAFERS

MECHANICAL TESTING OF BONDED SILICON ON INSULATOR WAFERS

著者名:

Farrens, S. N.

掲載資料名:

Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

239

発行年:

1992

開始ページ:

287

終了ページ:

292

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991330 [1558991336]

言語:

英語

請求記号:

M23500/239

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015723
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	3rd
会議開催地:	Boston, MA, USA
会議開催年:	1991.12.02-1991.12.05

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