MEASUREMENT OF VISCOELASTIC STRESS RELIEF IN PATTERNED SILICON-ON-INSULATOR COMPOSITE STRUCTURES WITH RAMAN SPECTROSCOPY
- 著者名:
- 掲載資料名:
- Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 239
- 発行年:
- 1992
- 開始ページ:
- 201
- 終了ページ:
- 206
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991330 [1558991336]
- 言語:
- 英語
- 請求記号:
- M23500/239
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |