CHARACTERIZATION OF STRESS AND TEXTURE IN RTCVD POLY-Si LAYERS BY X-RAY DIFFRACTION

CHARACTERIZATION OF STRESS AND TEXTURE IN RTCVD POLY-Si LAYERS BY X-RAY DIFFRACTION

著者名:

掲載資料名:

Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

239

発行年:

1992

開始ページ:

177

終了ページ:

182

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991330 [1558991336]

言語:

英語

請求記号:

M23500/239

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015723
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	3rd
会議開催地:	Boston, MA, USA
会議開催年:	1991.12.02-1991.12.05

類似資料:

1 国際会議録 ION IMPLANTATION DEFECT CHARACTERIZATION BY HIGH-RESOLUTION X-RAY DIFFRACTION Klappe, Jos G. E., Barsony, Istvan, Ryan, Tom W. Materials Research Society	7 国際会議録 Characterization of SiC Epitaxial Structures using High-Resolution X-Ray Diffraction Techniques Huang, X.R., Dudley, M., Cho, W., Okojie, R.S., Neudeck, P.G. Trans Tech Publications
2 国際会議録 X-RAY DIFFRACTION ANALYSIS OF DAMAGE AND DOPING EFFECTS IN LOW-DOSE, HIGH-ENERGY IMPLANTED SILICON Klappe, Jos G. E., Barsony, Istvan, Ryan, Tom W. Materials Research Society	8 国際会議録 X-Ray Diffraction Characterization of Thin Superconductive Films Kozaczek,K.J., Book,G.W., Watkins,T.R., Carter,W.B. Trans Tech Publications
3 国際会議録 RAPID THERMAL ANNEALING OF LOW-ENERGY P AND B IMPLANTS IN SILICON, OPTIMIZED BY HIGH RESOLUTION X-RAY DIFFRACTION Klappe, J. G. E., Barsony, I., Woerlee, P. H., Ryan, T. W., Alkemade, P. MRS - Materials Research Society	9 国際会議録 CHARACTERIZATION OF GaAs/Si INTERFACE STRUCTURE BY X-RAY DIFFRACTION Specht, E.D., Ice, G.E., Peters, C.J., Sparks, C.J., Lucas, N., Zhu, X.-M., Moret, R., Morkoc, H. Materials Research Society
4 国際会議録 X-ray diffraction characterisation of polysilicon layers Klappe,J.G.E., Barony,I., Ryan,T.W. Trans Tech Publications	10 国際会議録 X-ray Residual Stress Measurement in Films with Crystallographic Texture and Grain Shape Yu, L. G., Hendrix, B. C., Xu, K. W., He, J. W., Gu, H. C. MRS - Materials Research Society
5 国際会議録 RAPID THERMAL OXIDATION FOR PASSIVATION OF POROUS SILICON Barsony, I., Klappe, J. G. E., Vazsonyi, E., Lohner, T., Fried, M. MRS - Materials Research Society	11 国際会議録 Strain and Texture in Al-Interconnect Wires Measured by X-ray Microbeam Diffraction Tamura, N., Chung, J-S., Ice, G. E., Larson, B. C., Budai, J. D., Tischler, J. Z., Yoon, M., Williams, E. L., Lowe, W. … MRS - Materials Research Society
6 国際会議録 In-Line Characterization of Heterojunction Bipolar Transistor Base Layers by High-Resolution X-Ray Diffraction N. Duy Nguyen, R. Loo, A. Hikavyy, B. Van Daele, P. Ryan Electrochemical Society	12 国際会議録 Characterization of Stress Relaxation, Dislocations and Crystallographic Tilt Via X-ray Microdiffraction in GaN (0001) Layers Grown by Maskless Pendeo-Epitaxy Barabash, R. I., Ice, G. E., Liu, W., Einfeldt, S., Hommel, D., Roskowski, A. M., Davis, R. F. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12