Blank Cover Image

EFFECT OF DEPOSITION CONDITIONS ON INTRINSIC STRESS, PHASE TRANSFORMATION AND STRESS RELAXATION IN TANTALUM THIN FILMS

著者名:
掲載資料名:
Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
239
発行年:
1992
開始ページ:
51
終了ページ:
56
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991330 [1558991336]
言語:
英語
請求記号:
M23500/239
資料種別:
国際会議録

類似資料:

Svilan, V., Harper, J. M. E., Cabral, C., Jr., Clevenger, L. A.

MRS - Materials Research Society

Clevenger, L. A., Arcot, B., Ziegler, W., Colgan, E. G., Hong, Q. Z., d'Heurle, F. M., Cabral, C., Jr., Gallo, T. A., …

MRS - Materials Research Society

Quintero, A., Libera, M., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E.

MRS - Materials Research Society

Arcot, B., Clevenger, L. A., Murarkar, S. P., Harper, J. M. E., Cabral Jr., C.

Materials Research Society

Cabral, C., Jr., Clevenger, L. A., Schad, R. G.

MRS - Materials Research Society

Harper, J. M. E., Clevenger, L. A., Colgan, E. G., Cabral, C., Jr., Arcot, B.

MRS - Materials Research Society

Clevenger, L. A., Hong, Q. Z., Mann, R., Harper, J. M. E., Barmak, K., Cabral, C., Jr., Nobili, C., Ottaviani, G.

MRS - Materials Research Society

Gungor, A., Barmak, K., Rollett, A.D., Cabral, C., Jr., Harper, J.M.E.

Materials Research Society

Barmak, K., Lucadamo, G. A., Cabral, C., Jr., Lavoie, C., Harper, J. M. E.

MRS - Materials Research Society

Bojarczuk, N.A., Clevenger, L.A., Holloway, K., Harper, J.M.E., Cabral, C., Schad, R.G., Stolt, L.

Materials Research Society

Gungor, A., Barmak, K., Rollett, A.D., Cabral Jr, C., Harper, J.M.E.

Trans Tech Publications

Colgan, E. G., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12