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MOLECULAR DYNAMICS SIMULATIONS AND EXPERIMENTAL EVIDENCE FOR DEEP PENETRATION BY CHANNELED IONS DURING LOW-ENERGY ION BOMBARDMENT OF III-V SEMICONDUCTORS

著者名:
Stoffel, N. G.
Schwartz, S. A.
Pudensi, M. A. A.
Kash, K.
Florez, L. T.
Harbison, J. P.
Wilkens, B. J.
さらに 2 件
掲載資料名:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
236
発行年:
1992
開始ページ:
247
終了ページ:
252
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991309 [1558991301]
言語:
英語
請求記号:
M23500/236
資料種別:
国際会議録

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