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STRESS AND PHASE CHANGES IN ION-ASSISTED EVAPORATION OF THIN TANTALUM FILMS

著者名:
掲載資料名:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
235
発行年:
1992
開始ページ:
715
終了ページ:
720
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991293 [1558991298]
言語:
英語
請求記号:
M23500/235
資料種別:
国際会議録

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