TEMPERATURE DEPENDENCE OF Ar SPUTTERING OF CoSi2 THIN FILMS ON Si AND SiO2
- 著者名:
- 掲載資料名:
- Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 235
- 発行年:
- 1992
- 開始ページ:
- 319
- 終了ページ:
- 324
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991293 [1558991298]
- 言語:
- 英語
- 請求記号:
- M23500/235
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Materials Research Society |
10
国際会議録
(100) Oriented Platinum Thin Films Deposited by dc Magnetron Sputtering on SiO2/Si Substrates
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Kluwer Academic Publishers |
12
国際会議録
Formation of High-Resistivity Silver-Silicon Dioxide Composite Thin Films Using Sputter Deposition
Materials Research Society |