AN INVESTIGATION OF BURIED LAYER FORMATION BY 40keV OXYGEN IMPLANTATION INTO SILICON
- 著者名:
Li, Y. Kilner, A. Chater, R. J. Tate, T. J. Hemment, P. L. F. Nejim, A. - 掲載資料名:
- Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 235
- 発行年:
- 1992
- 開始ページ:
- 115
- 終了ページ:
- 120
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991293 [1558991298]
- 言語:
- 英語
- 請求記号:
- M23500/235
- 資料種別:
- 国際会議録
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