SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING
- 著者名:
- 掲載資料名:
- Phase transformation kinetics in thin films : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 230
- 発行年:
- 1992
- 開始ページ:
- 201
- 終了ページ:
- 206
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991248 [1558991247]
- 言語:
- 英語
- 請求記号:
- M23500/230
- 資料種別:
- 国際会議録
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